PRODUCT

Defect  Management  System  Solution

It is a solution which collects data from facilities during the semiconductor/display inspection process,
and analyzes and manages them.

Key Technology

  • Data integration

  • Big data analysis

  • Business domain

  • Deep learning computation

  • Data distribution,
    parallel processing

  • Data mirroring

DMS (Defect Management System)
A system for analysis and management of various data from inspections and facilities
RMS (Recipe Management System)
A recipe management system for measurement and inspection facilities
MiDEWS (Mirero Defect Early Warning System)
A process abnormality alarm system which uses various data from inspection facilities
ADR (Auto Defect Review System)
A system for raising the efficiency of operation of the existing CD/DR-SEM
  • Recipe ? Process Setting Values for Operation of the Equipments
  • CD ? Critical Dimension
  • DR ? Defect Review
  • SEM ? Scanning Electron Microscope