Simulation Solution
It is a solution which simulates a semiconductor optical inspection equipment
and provides optimal defection conditions and facility optimization.
Key Technology
3D Rendering
HPC
FDTD
RCWA
Data distribution,
Parallel processing
- OPTICA(Inspection Facility Simulation System)
- Inspection Facility Simulation System: A simulation system for tuning recipe conditions of inspection facilities and optimization of facility development
- Recipe ? Process Setting Values for Operation of the Equipments
- FDTD ? Finite-difference time-domain
- RCWA ? Rigorous Coupled-Wave Analysis
- HPC ? High Performance Computing